Minute connector

ABSTRACT

A minute connector with a first connecting member and a second connecting member. The first connecting member has a first conductive portion disposed at each of the bottom surface of a plurality of recessing portions set at an insulative first substrate connected to first ends, and first contacts made of first carbon nanotube bundles protruding from the surface of a first substrate at second ends. The second connecting member has second contacts made of second carbon nanotube bundles connected to second conductive portions disposed at each of the bottom surface of recessing portions set at an insulative second substrate corresponding to each of the first contacts at first ends. Each of the first carbon nanotubes contacts between the second carbon nanotubes with each other in an overlapping manner at the state that the first contacts are contacted with each of the corresponding second contacts.

CROSS REFERENCE TO RELATED APPLICATION

The contents of the following Japanese patent application isincorporated herein by reference, No. 2009-200357 filed on Aug. 31,2009.

BACKGROUND

1. Technical Field

The present invention relates to a minute connector having minutecontact structure.

2. Description of the Related Art

The contacts of most of the current connectors are fabricated by thepress piercing of a plate that uses the spring material. It is thoughtthat the lower limit of the size of the contact is about 0.2 mm undermechanical fabrication. On the other hand, in the connection interfacestructure of the semiconductor equipment, the structure of 0.1 mm orless has already been realized. The connection interface of thesemiconductor equipment is, however, not aimed to repeat steadydetaching.

In recent years, the miniaturization of connectors has been acceleratedin accordance with the miniaturization of electronics devices. Minutecontacting portions with the size and the pitch being disposed of 0.2 mmor less are required in accordance with the miniaturization of theconnectors. In the case of forming such contacting portions, it isdifficult to precisely fabricate under machine work around the lowerlimit of the fabricating preciseness. Furthermore, the manufacturingyield decreases and the manufacturing cost increases.

As a method of forming a minute contacting portions, metallic patternformation technique by electroforming method or electroplating method,or the method of forming the conductive pattern using minute conductingparticles or the like are known. In the contact formed by the methodsmentioned above, the oxide film will be formed on the surface and thesurface becomes uneven. In order to steadily obtain the connection witha low contacting resistance, it is required to destroy the oxide film bymaking the contacts slide mutually under pressure and to increase thecontacting area between the contacts by applying a certain load.

In a minute contact being made of the metallic pattern or the conductivepattern, however, it is difficult to secure the elasticity modulus andto obtain the steady contact between the contacts. Moreover, increasingof the pressing force to secure the contact of the contacting portionscauses the problems of the minute transformation by abrasion of thesurfaces of the contacts or the short-circuit by abrasion powder or thelike. In this way, it is questionable to apply pressure with the load orthe like to minute contacting portions.

Connectors being formed with carbon nanotubes (CNT) having excellentabrasion tolerance and high electric conductivity orienting in thedirection of the thickness of a substrate and using the CNT as contactsare reported (refer to Japanese Patent Application Publication Nos.2009-7461 and 2007-287375). In order to secure the contact of thecontacting portions, the end portions of CNT bundles that are composedof a plurality of CNT's are protruded from the opening edge of thesubstrate. If the CNT bundles are made contacted with metal electrodesby pressing, the CNT bundles will be dispersed. In this case, because apart of CNT's is dispersed outside or buckled, there is a possibilitythat the contact with the adjacent contacts or the like will be caused.This might prevent the pitch from being narrowed.

SUMMARY

In accordance with the first aspect of the present invention, a minuteconnector for connecting between an insulative first substrate and aninsulative second substrate is provided.

(a) The insulative first substrate is provided with a plurality of firstdepressed portions and a first conductive portion is disposed at each oftheir bottom surfaces. The insulative second substrate is provided witha plurality of second depressed portions and a second conductive portionis disposed at each of their bottom surfaces.

The connector is provided with

(b) a first connecting member having the plurality of first contactscorresponding to the plurality of first depressed portions, the firstcontacts being made of the plurality of first carbon nanotube bundlesrespectively connected to the first conductive portions at their firstends and protruding from the surface of the first substrate at theirsecond ends and

(c) a second connecting member having a plurality of second contactscorresponding to the plurality of second depressed portions, the secondcontacts being made of a plurality of second carbon nanotube bundlesrespectively connected to the second conductive portions at their firstends.

(d) Since the second ends of the plurality of first carbon nanotubes areinserted between second ends of the plurality of second carbon nanotubesso as to contact with each other in an overlapping manner, the pluralityof first contacts each contact a corresponding one of the plurality ofsecond contacts.

In accordance with the second aspect of the present invention, a minuteconnector for connecting between an insulative first substrate and aninsulative second substrate is provided.

(a) The insulative first substrate is provided with a plurality of firstdepressed portions and a plurality of first conductive portions aredisposed at each of the bottom surfaces. The insulative second substrateis provided with a plurality of second depressed portions and aplurality of second conductive portions are disposed at each of thebottom surfaces.

The connector is provided with

(b) a first connecting member having a plurality of first contactscorresponding to a plurality of first depressed portions, the firstcontacts being made of the plurality of first carbon nanotube bundlesrespectively connected to the first conductive portions at their firstends and protruding from the surface of the first substrate at theirsecond ends, and

(c) a second connecting member having a plurality of second contactscorresponding to a plurality of second depressed portions, the secondcontacts being made of the plurality of second carbon nanotube bundlesrespectively connected to the second conductive portions at their firstends.

(d) An area density of the plurality of first carbon nanotubes differsfrom that of the plurality of second carbon nanotubes.

Since the second ends of either the plurality of first carbon nanotubesor the plurality of second carbon nanotubes having a higher area densityare inserted into gaps between the second ends of the other carbonnanotubes with a lower area density so that the carbon nanotubes withthe lower area density overlap with portions of the carbon nanotubeswith the higher area density, a plurality of first contacts each contacta corresponding one of a plurality of second contacts.

In accordance with the present invention, a minute connector that issteadily and repeatedly connectable and possible to be miniaturized canbe presented. The summary clause does not necessarily describe allnecessary features of the embodiments of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows an example of the perspective view of the minute connectorin accordance with an embodiment of the present invention.

FIG. 2 shows a schematic view of the A-A cross section of the minuteconnector shown in FIG. 1.

FIG. 3 shows an example of the cross-sectional schematic view of thecontact of the minute connector in accordance with an embodiment of thepresent invention.

FIG. 4 shows a cross-sectional schematic view of the CNT contact of theminute connector in accordance with an embodiment of the presentinvention.

FIG. 5 shows an example of the cross-sectional schematic view of theslide of the minute connector in accordance with an embodiment of thepresent invention.

FIG. 6 shows first other example of the cross-sectional schematic viewof the minute connector in accordance with an embodiment of the presentinvention.

FIG. 7 shows second other example of the cross-sectional schematic viewof the minute connector in accordance with an embodiment of the presentinvention.

FIG. 8 shows third other example of the cross-sectional schematic viewof the minute connector in accordance with an embodiment of the presentinvention.

FIG. 9 shows another example of the plane schematic view of the minuteconnector in accordance with an embodiment of the present invention.

FIG. 10 shows an example of the plane schematic view of the minuteconnector in accordance with another embodiment of the presentinvention.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, embodiments of the present invention are explainedreferring to the figures. In the description of the following drawings,the same or a similar symbol is allocated to the same or a similarportion. The drawings are schematic, however, it should be noted thatthe relationship between the thickness and the plane dimension, thethickness ratio of each layer or the like are different from those ofreal ones. Therefore, the specific thickness or dimension has to bejudged taking the following explanations into consideration. It goeswithout saying that the mutual dimensional relationship or the ratio isin part different from each other among figures.

The embodiments of the present invention shown hereinafter are toillustrate the devices or method to specify the technological ideas ofthe present invention, however, the technological ideas of the presentinvention does not limit the materials, forms, structures, design or thelike to those mentioned below. The technological ideas of the presentinvention can be changed variously within the technological scopedescribed in the claims.

As it is shown in FIG. 1, the minute connector in accordance with anembodiment of the present invention is provided with a first connectingmember 10 and a second connecting member 20. The first connecting member10 is equipped with a first substrate 11 and a plurality of firstcontacts 16 a, 16 b, 16 c, etc. that extend from one end to the otherend of the first substrate. The first contacts 16 a, 16 b, 16 c arearranged with the width Wa and the pitch P in the directionperpendicular to the extending direction of the first contacts 16 a, 16b, 16 c. The second connecting member 20 is equipped with a secondsubstrate 21 and a plurality of second contacts 26 a, 26 b, 26 c, etc.that extend from one end to the other end of the second substrate. Thesecond contacts 26 a, 26 b, 26 c are arranged with the width Wb and thepitch P in the direction perpendicular to the extending direction of thefirst contacts 16 a, 16 b, 16 c.

The surface of the first contact 16 a opposes to the surface of thesecond contact 26 a. Similarly, each of the surface of the firstcontacts 16 b and 16 c opposes to each of the surface of the secondcontacts 26 b and 26 c respectively. When the first connecting member 10and the second connecting member are put together, each of the firstcontacts 16 a, 16 b and 16 c contacts each of the second contacts 26 a,26 b and 26 c respectively.

As it is shown in FIG. 2, the first contact 16 of the first connectingmember 10 is equipped with a first conductive portion 14 and a bundle 12consisting of a plurality of first CNT 2 (hereinafter called CNTbundle). The first conductive portion 14 is disposed at the bottomsurface of the recessed portion installed in the first substrate 11. Thefirst ends of each of the plurality of the first CNT 2 are connected tothe first conductive portion 14, and the second ends protrude from thelevel of the opening edge of the first substrate 11 with the height Ta.

Moreover, the second contact 26 of the second conductive member 20 isequipped with a second conductive portion 24 and a bundle 22 consistingof a plurality of second CNT 4 (hereinafter called CNT bundle). Thesecond conductive portion 24 is disposed at the bottom surface of therecessed portion installed in the first substrate 21. The first ends ofeach of the plurality of the second CNT 4 are connected to the secondconductive portion 24, and the second ends protrude from the level ofthe opening edge of the second substrate 21 with the height Tb.

The average diameters of the first CNT 2 and the second CNT 4, forexample, are within the range from about 2 nm to about 10 nmrespectively. The area density of the first CNT 2 with CNT bundle 12 andthe second CNT 4 with CNT bundle 14 take the area density within therange from about 10¹¹ cm⁻² to 10¹² cm⁻² respectively. Metallic materialssuch as gold (Au), silver (Ag), copper (Cu), aluminum (Al) or the likeare applied to the first conductive portion 14 and the second conductiveportion 24. An insulative substrate made of plastics, ceramics or thelike is applied to the first substrate 11 and the second substrate 12.

The CNT bundles 12 and 22 can be grown by an ordinary chemical vapordeposition (CVD) or the like. Such a metallic catalyst as cobalt (Co),iron (Fe), nickel (Ni) or the like is, for example, selectively formedon the semiconductor substrate of silicon (Si) or the like. CNT is grownvertically oriented on the semiconductor substrate by CVD usinghydrocarbon gas. CNT grown up in this way is transferred to the surfaceof the first conductive portion 14 of the first substrate 11 and thesurface of the second conductive portion 24 of the second substrate 21to form CNT bundles 12, 22 respectively.

As it is shown in FIG. 3, the surfaces of the first substrate 11 and thesecond substrate 21 are mutually contacted so as the first contact 16and the second contact 26 to contact each other. The first CNT 2 and thesecond CNT 4 contact so as the protruded portion with the height of Tafrom the surface of the first substrate 11 and the protruded portionwith the height of Tb from the surface of the second substrate 12 toenter into each other in an overlapping manner. No specific pressure isrequired to make the first contact 16 and the second contact 26 contact.Therefore, the stable connection between the first CNT 2 and the secondCNT 4 is available repeatedly.

The width Wa of the first contact 16, the width Wb of the second contact26 and the pitch P are not specifically restricted. Since the CNT bundlecan be formed in a minute pattern, a contact with the width or thepitch, for example, of 0.2 mm or less, that is the precision limitationof the machine fabrication, can be formed. Moreover, since no specificpressure is required between the first contact 16 and the second contact26, such problems as minute deformation due to the abrasion of thecontacts, the short-circuit due to the abraded powder or the like willnot occur. Therefore, the first contact 16 and the second contact 26 canbe formed with the pitch P of 0.2 mm or less, the width Wa and Wb of 0.1mm or less respectively.

After bringing the first connecting member 10 into contact with thesecond connecting member 20 as it is shown in FIG. 3, the firstconnecting member 10 is allowed to slide to the arrow-marked directionin the FIG. 4 against the second connecting member 20, for example.Then, the overlapped parts of the first CNT 2 and the second CNT 4 arebent as shown in FIG. 4, further stable connection comes to beavailable.

It is allowed to connect the first connecting member 10 with the secondconnecting member 20 by sliding. As it is shown in FIG. 5, the firstconnecting member 10 is allowed to slide to the arrow-marked directionagainst the second connecting member 20 after bringing one end of thefirst contact 16 into contact with the other end of the second contact26 in the extending direction of the first contact 16 and the secondcontact 26. The plurality of the first CNT 2 of the first contact 16 andthe plurality of the second CNT 4 of the second contact 26 come tocontact in an overlapping manner with each other while the protrudedportion from the first substrate 11 and the protruded portion from thesecond substrate 21 are being bent to the opposite direction by sliding.In this way, the first contact 16 and the second contact 26 can becontacted while the plurality of the first CNT 2 and the plurality ofthe second CNT 4 are being bent and overlapped by making the firstconnecting member 10 and the second connecting member 20 connect bysliding. In this reason, the connection between the first contact 16 andthe second contact 26 can be executed steadily and repeatedly.

In the case of executing the connection by sliding, it is desirable toform an insulative surface layers 32 of the abrasion coefficient, forexample, of 0.5 or less on the surfaces of the first substrate 11 andthe second substrate 21 respectively as it is shown in FIG. 6. Suchresin material as fluororesin, nylon or the like is applied to thesurface layer 32. The mechanical characteristics can be kept stable bysetting the surface layer 32 with a small abrasion coefficient even theconnection by sliding is executed repeatedly.

As shown in FIG. 6, a guide can be set parallel to the extendingdirection of the first contact 16 at the end portion of the firstsubstrate 11 so as to slide the first substrate 11 while allowing theplurality of the first contacts 16 to contact with the plurality of thecorresponding second contacts 26. The position of the plurality of thefirst contacts 16 can be adjusted with high precision to the position ofthe plurality of the corresponding second contact 26 using a guide 30,even though the first contact 16 and the second contact 26 of finewidths are arranged in a fine pitch.

Both of the first substrate 11 and the second substrate 21 are equippedwith the surface layer 32, however, it is allowed that only one of thesubstrates is equipped with the surface layer 32. At least one of thefirst substrate 11 and the second substrate 21 is allowed to be aninsulator with small abrasion coefficient. The guide 30 is set at thefirst substrate 11, however, it is allowed to set the guide 30 at thesecond substrate 21 instead. It is also allowed to set the guide 30 bothat the first substrate 11 and the second substrate 21.

THE FIRST VARIATION EXAMPLE

The minute connector in accordance with the first variation example ofthe embodiment of the present invention is provided with the firstconnecting material 10 equipped with the first contact 16 and a secondconnecting material 20 a equipped with the second contact 26, as it isshown in FIG. 7. The second contact 26 is equipped with a secondconductive portion 24 and a CNT bundle 22 a consisting of a plurality ofsecond CNT 4. The first ends of the plurality of second CNT 4 areconnected with the second conductive portion 24 that is disposed at thebottom surface of the recessed portion installed in the second substrate21 respectively, and the second ends are positioned below the level ofthe opening edge of the second substrate 21 with the depth Tc.

In the first variation example of the embodiment, the point that thesecond ends of the plurality of second CNT 4 are positioned below thelevel of an opening edge of the second substrate 21 is different fromthe embodiment. Since the other constituents are the same as those ofthe embodiment, the overlapping description is omitted.

In the case that the first CNT 2 and the second CNT 4 protrude from thelevel of the opening edges of the first substrate 11 and the secondsubstrate 21 respectively, as it is shown in FIG. 2 and FIG. 3, thefirst CNT 2 and the second CNT 4 at the respective outer circumferenceof the CNT bundle 12 and the CNT bundle 22 a are liable to be dispersedand buckled on the occasion of contact. Once the first CNT 2 and thesecond CNT 4 are buckled, the outer circumference of the first CNT 2 andthe second CNT 4 will get broken by repeating the sliding connection andit possibly causes the short circuit.

In the first variation example of the embodiment, the plurality of firstCNT 2 protrude from the opening edges of the first substrate 11 with theheight Ta, however, the plurality of second CNT 4 recess below theopening edge of the second substrate 21 to the recessed portion, as itis shown in FIG. 7. Here, the height Ta is to be larger than the depthTc and the width Wa of the first contact 16 is to be equal to or lessthan the width Wb of the second contact 26. When the first contact 16 iscontacted with the corresponding second contact 26, the protrudingportion of the first CNT 2 is engaged with the recessed portion of thesecond substrate 21. Therefore, no buckling will occur in the first CNT2, and the connection of the first connecting member 10 with the secondconnecting member 20 a can be executed steadily and repeatedly.

In the explanation mentioned above, the plurality of second CNT 4 arerecessed from the opening edge of the second substrate 21. However, itis allowed to make the plurality of first CNT 2 recess from the openingedge of the first substrate 11 and to make the plurality of second CNT 4protrude from the opening edge of the second substrate. In this case,the width Wa of the first contact 16 is equal to or larger than thewidth Wb of the second contact 26.

THE SECOND VARIATION EXAMPLE

The minute connector in accordance with the second variation example ofthe embodiment of the present invention is provided with the firstconnecting member 10 equipped with the first contact 16 and a secondconnecting member 20 b equipped with the second contact 26, as it isshown in FIG. 8. The second contact 26 is equipped with a secondconductive portion 24 and a CNT bundle 22 b consisting of a plurality ofsecond CNT 4. The area density of the plurality of second CNT 4 issmaller than the area density of the plurality of first CNT 2.

In the second variation example of the embodiment, the point that thearea density of the plurality of second CNT 4 is smaller than the areadensity of the first CNT 2 is different from the embodiment and thefirst variation example. Since the other constituents are the same asthose of the embodiment and of the first variation example, theoverlapping description is omitted.

Since the area density of the plurality of second CNT 4 is smaller thanthe area density of the plurality of first CNT 2, as it is shown in FIG.8, it is easy to make the plurality of first CNT 2 overlap in the gap ofthe plurality of second CNT 4. As a result, the connection of the firstconnecting member 10 and the second connecting member 20 b can beexecuted steadily and repeatedly.

In the explanation mentioned above, the area density of the plurality ofsecond CNT 4 is smaller than the area density of the plurality of firstCNT 2. However, it is allowed to make the area density of the pluralityof second CNT 4 larger than the area density of the plurality of firstCNT 2.

THE THIRD VARIATION EXAMPLE

The minute connector in accordance with the third variation example ofthe embodiment of the present invention is provided with the firstconnecting member 10 a equipped with the first contact 16 and a secondconnecting member 20 equipped with the second contact 26, as it is shownin FIG. 9. The first contact 16 is equipped with an end portion 17having a shape of triangle at the first end of the first substrate 11.

In the third variation example of the embodiment, the point that thefirst contact 16 is equipped with a triangle end portion 17 is differentfrom the embodiment, the first variation example, and the secondvariation example. Since the other constituents are the same as those ofthe embodiment, the first variation example and the second variationexample, the overlapping description is omitted.

For example, the first contact 16 is allowed to contact with the secondcontact 26 by sliding the first connecting member 10 a against thesecond connecting member 20, as it is shown in FIG. 9. In this case, thefirst connecting member 10 is slid while being contacted with the secondcontact 26 from the side of the end portion 17 of the first contact 16.Since the end of the end portion 17 is narrower than the width of thecorresponding second contact 26, the contact between the firstconnecting member 16 and the second connecting member 26 from thesliding state to the fixed state can be executed steadily andrepeatedly.

The shape of the end portion 17 is not necessarily limited to thetriangle. Since the shape of the end portion 17 is to set a gradient inorder to get a stable deformation during the sliding insertion, theshape is allowed, for example, to be trapezoidal or stepwise. It is alsoallowed to take a shape that becomes thinner with curvature toward theend.

(Other Embodiments)

The present invention has been hereinbefore explained using embodiments,however, the description or the drawings that are a part of thisdisclosure shall not be deemed to limit the invention. Through thisdisclosure, forms of various substitution embodiments, embodimentexamples and applied technologies will be well known in the personsskilled in the art.

In the embodiments of the present invention, the first contact 16 andthe second contact 26 extend from the first end to the second end of thefirst substrate 11 and the second substrate 21. However, the shapes ofthe first contact 16 and the second contact 26 are not restricted. Aplurality of first contacts and a plurality of second contacts withcircular or rectangular shapes are allowed to be scattered on the firstsubstrate and the second substrate respectively. For example, the firstconnecting member 10A is equipped with a plurality of circular firstcontacts 16A, 16B, 16C and 16D scattered on the surface of the firstsubstrate 11, as it is shown in FIG. 10. The second connecting member20A is equipped with a plurality of circular second contacts 26A, 26B,26C and 26D scattered on the surface of the second substrate 12corresponding to the first contacts 16A, 16B, 16C and 16D respectively.The plurality of second contacts 26A, 26B, 26C and 26D correspond to theplurality of first contacts 16A, 16B, 16C and 16D respectively.

In this way, it is clear that various embodiments not described aboveare also within the scope of the present invention. Therefore, thetechnical scope of the present invention is to be determined only by thespecified inventional items related to the claims appropriate to theexplanations mentioned above.

The present invention can be applied to minute connectors with finecontact structure.

1. A minute connector for connecting between an insulative firstsubstrate and an insulative second substrate, the insulative firstsubstrate being provided with a plurality of first depressed portionsdepressed with respect to a surface of the first substrate, at eachbottom surface of which a first conductive portion is disposed, theinsulative second substrate being provided with a plurality of seconddepressed portions depressed with respect to a surface of the secondsubstrate, at each bottom surface of which a second conductive portionis disposed, the minute connector comprising: a first connecting memberhaving a plurality of first contacts corresponding to the plurality offirst depressed portions, the first contacts comprising a plurality offirst carbon nanotube bundles respectively connected to the firstconductive portions at first ends thereof and protruding from thesurface of the first substrate at second ends thereof; and a secondconnecting member having a plurality of second contacts corresponding tothe plurality of second depressed portions, the second contactscomprising a plurality of second carbon nanotube bundles respectivelyconnected to the second conductive portions at first ends thereof;wherein the second ends of the plurality of first carbon nanotubes areinserted between second ends of the plurality of second carbon nanotubesso as to contact with each other in an overlapping manner when thesurface of the first substrate contacts the surface of the secondsubstrate, whereby the plurality of first contacts each contact acorresponding one of the plurality of second contacts.
 2. The minuteconnector according to claim 1, wherein the second ends of the pluralityof second carbon nanotubes are each positioned at a level below asurface of the second substrate.
 3. The minute connector according toclaim 1, wherein each of the plurality of first contacts extends from afirst end of the first substrate surface to a second end thereof; eachof the plurality of second contacts extends from a first end of asurface of the second substrate to a second end thereof; and afterbringing the first end of the first substrate into contact with thesecond end of the second substrate, the first substrate is slid relativeto the second substrate from the second end of the second substrate tothe first end thereof whereby the plurality of first contacts eachcontact a corresponding one of the plurality of second contacts.
 4. Theminute connector according to claim 3, wherein at least one of the firstand second substrates includes a guide parallel to an extendingdirection of the plurality of first contacts so that the first substrateis allowed to slide while the plurality of first contacts are each incontact with the corresponding one of the plurality of second contacts.5. The minute connector according to claim 3, wherein a frictioncoefficient between the surfaces of the first and second substrates is0.5 or less.
 6. The minute connector according to claim 3, wherein awidth of each of the plurality of first contacts at the first end of thesurface of the first substrate is smaller than that of a correspondingone of the plurality of second contacts at the first end of the surfaceof the second substrate.
 7. The minute connector according to claim 1,wherein the plurality of first contacts are scattered on the firstsubstrate, and the plurality of second contacts are scattered on thesecond substrate.
 8. The minute connector according to claim 1, whereinthe plurality of first contacts each have a width of 0.1 mm or less andare arranged with a pitch of 0.2 mm or less.
 9. A minute connector forconnecting between an insulative first substrate and an insulativesecond substrate, the insulative first substrate being provided with aplurality of first depressed portions depressed with respect to asurface of the first substrate, at each bottom surface of which a firstconductive portion is disposed, the insulative second substrate beingprovided with a plurality of second depressed portions depressed withrespect to a surface of the second substrate, at each bottom surface ofwhich a second conductive portion is disposed, the minute connectorcomprising: a first connecting member having a plurality of firstcontacts corresponding to the plurality of first depressed portions, thefirst contacts comprising a plurality of first carbon nanotube bundlesrespectively connected to the first conductive portions at first endsthereof and protruding from the surface of the first substrate at secondends thereof; and a second connecting member having a plurality ofsecond contacts corresponding to the plurality of second depressedportions, the second contacts comprising a plurality of second carbonnanotube bundles respectively connected to the second conductiveportions at first ends thereof; wherein the second ends of the pluralityof first carbon nanotubes are inserted between second ends of theplurality of second carbon nanotubes so as to contact with each other inan overlapping manner when the surface of the first substrate contactsthe surface of the second substrate, whereby the plurality of firstcontacts each contact a corresponding one of the plurality of secondcontacts; and wherein an area density of the plurality of first carbonnanotubes differs from that of the plurality of second carbon nanotubes,and the second ends of either the plurality of first carbon nanotubes orthe plurality of second carbon nanotubes with a higher area density areinserted into gaps between the second ends of the other carbon nanotubeswith a lower area density so that the carbon nanotubes with the lowerarea density overlap with portions of the carbon nanotubes with thehigher area density whereby the plurality of first contacts each contacta corresponding one of the plurality of second contacts.